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佳能发布 KrF 半导体光刻机 FPA-6400ES6a，宣称实现高生产率和业界高水平套刻精度

Source IT之家3h ago
Summary

This item is a 中文-language original; headline and summary shown as published.

IT之家 11 月 11 日消息，11 月 10 日，佳能在日本东京宣布，将于 2026 年 12 月上旬发售面向存储和逻辑芯片的 KrF（IT之家注：氟化氪）扫描式半导体光刻机“FPA-6400ES6a”。 ▲ KrF 扫描式半导体光刻机“FPA-6400ES6a” 官方表示，通过新开发的超高加速度载台缩短驱动时间…

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Tech
Region
China
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中文
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tech-4765c8de

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佳能发布 KrF 半导体光刻机 FPA-6400ES6a，宣称实现高生产率和业界高水平套刻精度 · Meridian Globe